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Applications
Optical alignment, metrology inspection, calibration scanning, wafer inspection, and wafer dicing.
Multiple options may be combined to create a solution ideal for point-to-point indexing or constant-velocity scanning.The ATR stage provides excellent motion accuracy, flatness, and wobble performance. Due to friction-free operation and no requirement for maintenance or lubrication, the platform is highly suitable for semiconductor wafer inspection and dicing environments.
Optional Accessories
Control system (an integrated drive-control controller or a driver and linear actuator may be optionally configured).
Encoder (incremental or absolute types available).
Filtration system (an FRL air treatment unit shall be configured; the air must be clean and dry, with particles filtered to below 0.5 μm).
Base and vibration isolation system (a granite base and vibration isolation system may be additionally configured).
Technical specifications | Unit | MKN-ATR150 | MKN-ATR200 | MKN-ATR300 |
Drive type | / | Direct Drive Motor | Direct Drive Motor | Direct Drive Motor |
Continuous torque | Nm | 1.6 | 2.8 | 2.8 |
Peak torque | Nm | 4.8 | 8.6 | 8.6 |
Rotation angle | ° | ＞360 | ＞360 | ＞360 |
Maximum speed*2 | rpm | 500 | 500 | 500 |
Turntable diameter | mm | 150 | 200 | 300 |
Axial load capacity | N | 190 | 320 | 600 |
Radial load capacity | N | 40 | 80 | 150 |
Axial runout*1 | nm | ≤100 | ≤100 | ≤100 |
Radial runout*1 | nm | ≤100 | ≤100 | ≤100 |
Tilt error*1 | arcsec | ≤1 | ≤1 | ≤0.8 |
Repeatability | arcsec | ≤1.6 | ≤1.6 | ≤1.6 |
Positioning accuracy (after compensation) | arcsec | ≤3.2 | ≤3.2 | ≤3.2 |
Working air pressure | Mpa | 0.5 | ||
Rotary table weight | Kg | 4.5 | 7.6 | 17.1 |
Rotary table material | Aerospace aluminum / stainless steel | |||
(1) Depends on the flatness of the stage mounting surface, load weight, orientation, and external forces applied to the stage.
(2) Limited by the payload, controller, or driver.
(3) The effective payload center of gravity is assumed to be positioned at the center within 50 mm above the motion stage. The stage is designed for horizontal operation only.
(4) Accuracy may be improved through controller error compensation. To achieve these values, the stage must be purchased together with the controller. Accuracy values are based on short-term measurements and do not consider the long-term effects of thermal drift on the stage. The measurement ambient temperature is 22 ℃ ± 0.5 ℃, and ambient vibration shall meet VC-C standard or above.
(5) Incremental or absolute encoders may be optionally selected according to actual requirements. Resolution shall be subject to the actual configuration selected, and the minimum step size is determined according to the resolution.
(6) To prevent insufficient air pressure, installation of a pressure switch is recommended, and the signal shall be input to the Emergency Stop (E-STOP) port of the motion controller.
(7) Customized special specifications and materials may be provided according to customer requirements.
