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Application areas
Optical alignment, metrology and inspection, calibration scanning, wafer inspection, wafer dicing.
Multiple options can be combined to create a solution ideal for point-to-point indexing or constant-speed scanning. The ATR platform offers excellent motion accuracy, flatness, and oscillation performance, and is well-suited for use in semiconductor wafer inspection and dicing environments due to its frictionless, maintenance-free, and lubrication-free operation.
Optional accessories
Control (optional integrated controller or driver and linear driver)
Encoder (incremental or absolute type optional)
Filtration system (requires an air filter triplet, must be clean and dry, and filter particles to below 0.5µm)
Base and vibration isolation system (a granite base and vibration isolation system can be added)
Specifications | Unit | MKN-ATR150 | MKN-ATR200 | MKN-ATR300 |
Driving method | / | Direct drive motor | Direct drive motor | Direct drive motor |
Continuous torque | Nm | 1.6 | 2.8 | 2.8 |
Peak torque | Nm | 4.8 | 8.6 | 8.6 |
Rotation angle | ° | ＞360 | ＞360 | ＞360 |
Maximum speed2 | rpm | 500 | 500 | 500 |
Turntable diameter | mm | 150 | 200 | 300 |
Axial load | N | 190 | 320 | 600 |
Radial load | N | 40 | 80 | 150 |
Axial runout*1 | nm | ≤100 | ≤100 | ≤100 |
Radial runout*1 | nm | ≤100 | ≤100 | ≤100 |
Swing angle*1 | arcsec | ≤1 | ≤1 | ≤0.8 |
Repeatability | arcsec | ≤1.6 | ≤1.6 | ≤1.6 |
Positioning accuracy (after compensation) | arcsec | ≤3.2 | ≤3.2 | ≤3.2 |
Working air pressure | Mpa | 0.5 | ||
Turntable weight | Kg | 4.5 | 7.6 | 17.1 |
Turntable material | Aviation aluminum/stainless steel | |||
（1）It depends on the flatness of the platform mounting surface, the load weight, the orientation, and the forces acting on the platform from the outside.
（2）Limited by the payload, controller, or driver.
（3）The effective load center of gravity is set within 50 mm above the center of the motion platform, which is designed for horizontal operation only.
（4）Accuracy can be improved through controller error compensation. To achieve these values, the platform must be purchased together with the controller. Accuracy values are taken over a short time period, disregarding the long-term effects of temperature drift on the platform. The measurement environment temperature is 22℃ ± 0.5℃, and the environmental vibration meets VC-C or higher standards.
（5）Incremental or absolute encoders can be selected according to actual needs. The resolution is based on the actual selection, and the minimum step size is determined according to the resolution.
（6）To prevent insufficient air pressure, it is recommended to install an air pressure switch and input the signal to the emergency stop (E-STOP) port of the motion controller.
（7）We can provide special specifications and material customization according to customer needs.
